DuPont™ Kalrez® 9100

In the semiconductor and microchip manufacturing industry, sealing materials must withstand extreme plasma environments, minimize particle generation, and maintain long-term sealing integrity.
DuPont™ Kalrez® 9100 is specially engineered to meet these demanding requirements — delivering superior durability, extended service life, and ultra-clean performance.

Key Features of Kalrez® 9100 Seals

• Low erosion and ultra-low particle generation in oxygen and fluorine-based plasma environments.

• Outstanding resistance to dry process chemistries, ideal for harsh plasma etching processes.

• Excellent thermal stability, performing reliably at temperatures up to 300°C (572°F).

• Very low outgassing and ultra-low metal content, minimizing contamination risks.

• High elastic recovery and low compression set, ensuring long-lasting sealing integrity.

All Kalrez® 9100 parts are ultra-cleaned and packaged in a controlled environment to meet the stringent purity standards of semiconductor cleanrooms.

Typical Applications

• PECVD / ALD chamber door seals

• Isolation valve seals

• Slit valve and bonded door seals

• Process chamber lid seals

• Poppet valve seals and other selective dynamic applications

Proven Performance in Global Semiconductor Fabs

Leading semiconductor fabs in the U.S. and Europe have reported 2–3X longer seal life after switching to Kalrez® 9100:

• U.S. Fab (Metal Etch / Resist Strip): Preventive maintenance (PM) cycle extended from 400 to 1,200 RF hours, with no signs of cracking or performance degradation.

• European Fab (PECVD): Processed over 54,000 wafers with no evidence of erosion or deformation.

• Slit Valve Door Application: Operating cycle increased from 60 to 180 days, maintaining perfect sealing with zero leakage.

Kalrez® 9100 outperforms conventional FFKM seals containing fillers such as carbon black or metal oxides. Its filler-free formulation minimizes contamination risks and ensures exceptional plasma resistance and reliability.

Why Choose DuPont™ Kalrez® 9100

✅ Up to 3X longer seal life
✅ Reduced downtime and maintenance costs
✅ Minimized particle contamination for ultra-clean processes
✅ Reliable sealing performance under harsh plasma conditions

Contact Filterfine Vietnam – Official Distributor of DuPont™ Kalrez®

Filterfine Vietnam is the authorized distributor of DuPont™ Kalrez® in Vietnam, providing high-performance FFKM sealing solutions and technical expertise for semiconductor, plasma, and corrosive environments.

🌐 Website: https://filterfinevn.com
📞 Hotline: 0961.152.844
💬 Zalo OA: https://zalo.me/3662661132832477703