Fluorogard® NX Filter

Product Overview

The Fluorogard® NX filter by Entegris is specifically designed for handling corrosive chemicals and solvents in advanced Wet Etch & Clean (WEC) applications. Featuring hydrophobic PTFE/PFA membrane material, this filter delivers high filtration performance, cost efficiency, and reduced system setup time. The prewet version, infused with 0.9% H₂O₂, enables rapid startup in aqueous chemical environments and prevents alcohol-related reactions.

Technical Specifications

Key Features

• Hydrophobic PTFE/PFA Membrane: Enhances surface area, improves flow performance, and reduces pressure drop.

• Thermoplastic PFA Construction: Provides excellent chemical compatibility and minimizes metal and chloride extractables.

• Prewet with 0.9% H₂O₂: Reduces system setup time and prevents alcohol reactions in aqueous environments.

User Benefits

• High Filtration Efficiency: Effectively removes particles and impurities from aggressive chemical solutions.

• Operational Cost Savings: Minimizes setup time and maintenance costs.

• Exceptional Durability: Resistant to harsh chemicals and high temperatures.

• Quick Startup: Prewet design shortens system initialization time.

Applications

The Fluorogard® NX filter is widely used in:

• Semiconductor Industry: Filtering solutions during chip and electronic component manufacturing.

• Flat Panel Industry: Filtering chemical liquids in LCD and OLED screen production.

• Chemical Industry: Filtering liquids in the production of chemicals and other electronic-grade materials.

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Reference link:https://www.entegris.com/shop/en/USD/products/liquid-filtration-and-purification/liquid-filters/Fluorogard-NX-Filter/p/FluorogardNXFilter?industry=