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Protego® Plus IPA Purifier
Product Introduction
The Protego® Plus IPA Purifier from Entegris is an advanced solvent filtration solution specifically engineered for effective removal of particles and metal ions in IPA (Isopropyl Alcohol) cleaning applications. Equipped with a 15 nm PTFE membrane and constructed with ultraclean PFA materials, this purifier delivers outstanding filtration performance and durability, meeting the stringent requirements of modern semiconductor manufacturing processes.
Specifications
Product Code | Membrane Type | Particle Retention | Ion Exchange Capacity | Membrane Area (m²) | Inlet/Outlet Size (inch) | Max Operating Temp. | Max Operating Pressure |
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P1500 | PTFE | 15 nm | 0.48 meq | 0.2 | 3/8″ I/O – 1/4″ V/D | 70°C (158°F) | 0.59 MPa @ 25°C |
P3000 | PTFE | 15 nm | 1.18 meq | 0.49 | 3/8″ I/O – 1/4″ V/D | 70°C (158°F) | 0.59 MPa @ 25°C |
Chem-Line™ II ATE 10” | PTFE | 15 nm | 4.30 meq | — | 1/2″ I/O – 1/4″ V/D | 80°C (176°F) | 0.59 MPa @ 25°C |
Key Features
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15 nm PTFE membrane: Effectively removes particles and metal ions down to 15 nm in size.
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Ultraclean PFA construction: Minimizes particle generation and ensures high purity.
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High ion exchange capacity: Efficiently eliminates metal ions, maintaining long-term filtration performance.
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Integrated filter-purifier design: Combines filtration and purification in one unit for space-saving installation.
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High thermal resistance: Operates reliably at temperatures up to 80°C (176°F).
Benefits
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Enhanced production performance: Reduces downtime and increases throughput.
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Assured product quality: Effectively removes contaminants, ensuring the purity of IPA.
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Lower operational costs: Long service life reduces the frequency of replacements.
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Easy system integration: Flexible design fits easily into existing systems.
Applications
The Protego® Plus IPA Purifier is widely used in:
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Semiconductor industry: For IPA filtration in chip and electronic component production, especially in sub-28 nm technologies.
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IPA cleaning processes: Ensures high-purity IPA for critical cleaning steps.
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Point-of-use (POU) applications: Installed close to the point of use to ensure optimal filtration performance.
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