Protego® AT 5 nm PURIFIER

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Protego® AT 5 nm Purifier

Product Introduction

The Protego® AT 5 nm purifier from Entegris is an advanced filtration solution designed to effectively remove particles and metal contaminants from highly corrosive solvents such as IPA (Isopropyl Alcohol). Featuring a 5 nm PTFE membrane and a dedicated ion exchange (IEX) layer, this product delivers exceptional filtration performance and durability to meet the strict requirements of modern semiconductor manufacturing.


Specifications

Product Code Membrane Type Particle Retention Inlet/Outlet Size (inch) Max Operating Temperature Max Operating Pressure
AT5NMPurifier PTFE 5 nm 5 nm 1/2″ – 1″ 80°C (176°F) 2.7 bar (40 psid)

Key Features

  • 5 nm PTFE membrane: Effectively removes particles and metals down to 5 nm in size.

  • Ion exchange (IEX) layer: Enhances metal removal and maintains long-term filtration efficiency.

  • Integrated design: Combines filtration and purification in a single unit, saving space and simplifying installation.

  • High-quality fluoropolymer materials: Ensures excellent durability and heat resistance in corrosive environments.


Benefits

  • Enhanced production performance: Reduces downtime and increases throughput.

  • Assured product quality: Effectively eliminates contaminants, ensuring solvent purity.

  • Lower operational costs: Long service life minimizes the need for frequent replacements.

  • Easy system integration: Flexible design fits seamlessly into a wide range of systems.


Applications

The Protego® AT 5 nm Purifier is widely used in:

  • Semiconductor industry: For filtering solvents during chip and electronic component manufacturing.

  • Flat panel display industry: For liquid filtration in LCD and OLED production.

  • Chemical industry: For solvent filtration in the production of chemicals and electronic materials.

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Reference link: https://www.entegris.com/shop/en/USD/products/liquid-filtration-and-purification/liquid-purifiers/Protego-AT-5-nm-Purifier/p/ProtegoAT5nmPurifier?industry=

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