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Wafergard® III NF-30 In-line Gas Filter
Product Overview
The Wafergard® III NF-30 In-line gas filter offers ultra-clean, high-efficiency gas filtration, specifically engineered for systems requiring exceptional gas purity and long-term durability. With its all-metal construction and proprietary sintered nickel membrane, this filter is ideal for the most demanding applications in the semiconductor, electronics, and chemical processing industries.
Technical Specifications
Specification | Wafergard® III NF-30 In-line |
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Part Numbers | WG3NS3FF2 / WG3NS3JJ2 / WG3NS3RF2 / WG3NS6RR2 / WG3NS6SL2 |
Maximum Flow Rate | 30 slpm |
Connection Size | 1/4″ Gasket seal (VCR compatible) or Butt weld |
Filter Media | Proprietary sintered nickel membrane |
Housing Material | Electro-polished F20 stainless steel |
Post-Filter Particle Cleanliness | < 0.03 particles/liter (>0.01 µm) |
Particle Retention Efficiency | 99.9999999% (9 LRV) @ 30 slpm |
Maximum Inlet Pressure | 50 bar (725 psig) @ 100°C |
Maximum Operating Temperature | 400°C (inert gases); 50°C (corrosive gases) |
Helium Leak Rate | Tested to 1×10⁻⁹ atm-cc/sec |
Warranty | 5 years |
Key Features
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Proprietary Nickel Membrane: Provides ultra-fine particle filtration ≥0.0015 µm with 9 LRV removal efficiency.
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All-Metal Construction: Enhances durability, corrosion resistance, and heat tolerance.
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Superior Cleanliness: Delivers post-filter gas purity of <0.03 particles/liter, ideal for high-purity processes.
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High Pressure & Temperature Performance: Operates reliably at temperatures up to 400°C and pressures up to 50 bar.
Benefits
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Ensures Gas Purity: Protects critical processes by minimizing contamination risks.
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Extends Equipment Lifespan: Shields downstream components from particulates, reducing wear and prolonging service life.
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Reduces Maintenance Needs: Durable build and consistent performance lower maintenance frequency and replacement costs.
Applications
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Ultra-Clean Gas Systems: Widely used in semiconductor, flat panel, LED, and solar manufacturing.
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High-Temperature Applications: Ideal for operations involving elevated heat and pressure.
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Gas Distribution Systems: Fits seamlessly into valve-manifold boxes and bulk gas distribution lines.
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Fluoropolymer Filter Replacement: An advanced alternative to traditional fluoropolymer gas filters for enhanced performance.
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