Wafergard® III NF-30 In-line GAS FILTER

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Wafergard® III NF-30 In-line Gas Filter


Product Overview

The Wafergard® III NF-30 In-line gas filter offers ultra-clean, high-efficiency gas filtration, specifically engineered for systems requiring exceptional gas purity and long-term durability. With its all-metal construction and proprietary sintered nickel membrane, this filter is ideal for the most demanding applications in the semiconductor, electronics, and chemical processing industries.


Technical Specifications

Specification Wafergard® III NF-30 In-line
Part Numbers WG3NS3FF2 / WG3NS3JJ2 / WG3NS3RF2 / WG3NS6RR2 / WG3NS6SL2
Maximum Flow Rate 30 slpm
Connection Size 1/4″ Gasket seal (VCR compatible) or Butt weld
Filter Media Proprietary sintered nickel membrane
Housing Material Electro-polished F20 stainless steel
Post-Filter Particle Cleanliness < 0.03 particles/liter (>0.01 µm)
Particle Retention Efficiency 99.9999999% (9 LRV) @ 30 slpm
Maximum Inlet Pressure 50 bar (725 psig) @ 100°C
Maximum Operating Temperature 400°C (inert gases); 50°C (corrosive gases)
Helium Leak Rate Tested to 1×10⁻⁹ atm-cc/sec
Warranty 5 years

Key Features

  • Proprietary Nickel Membrane: Provides ultra-fine particle filtration ≥0.0015 µm with 9 LRV removal efficiency.

  • All-Metal Construction: Enhances durability, corrosion resistance, and heat tolerance.

  • Superior Cleanliness: Delivers post-filter gas purity of <0.03 particles/liter, ideal for high-purity processes.

  • High Pressure & Temperature Performance: Operates reliably at temperatures up to 400°C and pressures up to 50 bar.


Benefits

  • Ensures Gas Purity: Protects critical processes by minimizing contamination risks.

  • Extends Equipment Lifespan: Shields downstream components from particulates, reducing wear and prolonging service life.

  • Reduces Maintenance Needs: Durable build and consistent performance lower maintenance frequency and replacement costs.


Applications

  • Ultra-Clean Gas Systems: Widely used in semiconductor, flat panel, LED, and solar manufacturing.

  • High-Temperature Applications: Ideal for operations involving elevated heat and pressure.

  • Gas Distribution Systems: Fits seamlessly into valve-manifold boxes and bulk gas distribution lines.

  • Fluoropolymer Filter Replacement: An advanced alternative to traditional fluoropolymer gas filters for enhanced performance.

 

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-nickel-gas-filters/Wafergard-III-NF-30-In-line-Gas-Filters/p/WafergardIIINF30InLineGasFilters

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