Wafergard® III NF-100 In-line Gas Filter

Product Introduction

The Wafergard® III NF-100 In-line gas filter is a high-performance, ultra-clean gas filtration solution specifically engineered for systems that require exceptional gas purity and durability. Featuring an all-metal construction and a proprietary sintered nickel membrane, this product is designed to meet the rigorous demands of the semiconductor, electronics, and chemical industries.

Technical Specifications

Key Features

• Proprietary Nickel Membrane: Enables ultra-fine particle filtration ≥0.0015 µm with up to 9 LRV removal efficiency.

• All-Metal Construction: Offers superior strength, heat resistance, and corrosion protection.

• Superior Cleanliness: Ensures post-filtration gas contains less than 0.03 particles per liter, ideal for ultra-high purity processes.

• High Heat and Pressure Resistance: Maintains stable performance up to 400°C and 50 bar.

Benefits

• Ensures Gas Purity: Minimizes contamination risk in sensitive manufacturing environments.

• Extends Equipment Life: Protects downstream equipment from particulates, reducing wear and extending operational lifespan.

• Reduces Maintenance: High durability and consistent performance reduce the frequency of filter replacement and system downtime.

Applications

• Ultra-Clean Gas Systems: Ideal for semiconductor, flat panel display, LED, and solar manufacturing facilities.

• High-Temperature Applications: Suitable for high-heat and high-pressure processing environments.

• Gas Distribution Systems: Used in valve manifold boxes and bulk gas distribution systems.

• Fluoropolymer Filter Replacement: Upgrade from traditional fluoropolymer filters for enhanced filtration performance.

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-nickel-gas-filters/Wafergard-III-NF-100-In-line-Gas-Filters/p/WafergardIIINF100InlineGasFilters