Wafergard® II SF Micro XL In-line Gas Filter

Product Overview

The Wafergard® II SF Micro XL In-line Gas Filter from Entegris is a high-performance gas filtration solution designed for ultra-high-purity (UHP) gas applications. It features a stainless steel filter membrane enclosed in a fully metallic housing, making it ideal for use in high-temperature and high-pressure environments—particularly in semiconductor and advanced electronics manufacturing.

Technical Specifications

Note: Rated at ≥99.9999999% efficiency for particles ≥0.0015 µm.

Key Features

• Exceptional Filtration Efficiency: Captures ≥99.9999999% of particles ≥0.0015 µm to ensure ultra-pure gas output.

• Durable Construction: Stainless steel membrane within a full metal housing withstands extreme operating conditions.

• Compact Design: With lengths from 50.8 mm to 84.1 mm, these filters easily integrate into compact or existing systems.

• Ultra-Low Leak Rate: Meets helium leak standard of 2 × 10⁻¹⁰ atm-cc/sec, ensuring system integrity and reliability.

User Benefits

• Maximum Gas Purity: Minimizes contamination risks in precision manufacturing environments.

• Enhanced System Performance: Supports rapid startup and stable gas flow.

• Lower Maintenance Costs: Long-lasting and stable performance reduces replacement frequency.

• Broad Compatibility: Fits standard gas systems and supports a variety of gases.

Applications

• Semiconductor Manufacturing: Ultra-high-purity gas filtration for critical wafer and chip fabrication steps.

• Industrial Applications: Suitable for inert, reactive, and ozone gas systems.

• Compressed Gas Systems: Delivers clean, dry gas for sensitive equipment operations

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-ptfe-gas-filters/Wafergard-MAX-HT-In-line-Gas-Filters/p/WafergardMAXHTInlineGasFilters