Wafergard® II SF Half In-line Gas Filter

Product Overview

The Wafergard® II SF Half In-line Gas Filter from Entegris is a high-performance solution engineered for ultra-high-purity (UHP) gas applications. Featuring a stainless steel filter membrane encased in a fully metallic housing, this filter is ideal for high-temperature and high-pressure environments—especially in semiconductor and electronics manufacturing processes.

Technical Specifications

Note: Rated at ≥99.9999999% efficiency for particles ≥0.0015 µm.

Key Features

• Ultra-High Filtration Efficiency: Removes ≥99.9999999% of particles ≥0.0015 µm, ensuring ultra-clean gas output.

• Robust All-Metal Construction: Stainless steel membrane within a fully metallic housing ensures compatibility with high-pressure and high-temperature applications.

• Compact Design: Only 67 mm in length—ideal for tight installations without requiring system redesign.

• Ultra-Low Leak Rate: Meets helium leak rate standard of 2 × 10⁻¹⁰ atm-cc/sec, ensuring system integrity and safety.

User Benefits

• Gas Purity Assurance: Minimizes the risk of contamination in critical manufacturing environments.

• System Efficiency: Supports rapid system startup and stable gas flow.

• Maintenance Cost Savings: Long-lasting performance reduces the frequency of filter replacements.

• Broad Compatibility: Suitable for a wide range of gases and standard connection systems.

Applications

• Semiconductor Manufacturing: Ultra-high-purity gas filtration for microelectronics fabrication.

• Industrial Applications: Effective in systems using inert gases, reactive gases, and ozone.

• Compressed Gas Systems: Delivers clean compressed gases for sensitive equipment.

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-ptfe-gas-filters/Wafergard-MAX-HT-In-line-Gas-Filters/p/WafergardMAXHTInlineGasFilters