Gasketgard® In-line Gasket Filter

Product Overview

The Gasketgard® In-line Gasket Filter from Entegris is an ultra-compact, all-metal gas filter engineered as a direct replacement for standard 1/4″, 3/8″, and 1/2″ VCR® gaskets. Designed for use in ultra-high-purity (UHP) gas systems, this filter performs reliably at temperatures up to 400°C (752°F), making it ideal for semiconductor and electronics manufacturing environments.

Technical Specifications

Key Features

• Ultra-Compact Design: Replaces standard VCR® gaskets without requiring additional installation space.

• High-Grade Construction: Made entirely from 316L stainless steel for excellent durability and heat resistance.

• Superior Filtration: Effectively captures fine particles to protect sensitive gas system components like mass flow controllers, valves, and regulators.

• Easy Installation: Optional retainer simplifies alignment during assembly.

User Benefits

• Protects Equipment: Reduces particle-induced damage, extending the lifespan of downstream components.

• Space-Saving: Compact, integrated design fits seamlessly into tight gas lines.

• High Reliability: Maintains consistent performance in high-temperature conditions.

• Easy Maintenance: Simple design allows quick inspection and replacement when needed.

Applications

• Semiconductor Industry: Protects UHP gas systems and devices from particle contamination.

• Electronics Manufacturing: Ideal for processes requiring stable and clean gas delivery.

• Industrial Gas Systems: Suitable for high-purity, high-temperature gas applications.

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-stainless-steel-gas-filters/Gasketgard-In-line-Gasket-Filters/p/GasketgardInLineGasketFilters#