GateKeeper® GPU GAS PURIFIER

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GateKeeper® GPU Gas Purifier


Product Overview

The GateKeeper® GPU is Entegris’ premium line of gas purifiers, engineered to remove impurities down to parts per trillion (ppt) levels. Designed for maximum purity in microelectronics processing, this purifier is compatible with a wide range of gases—including corrosive types like Cl₂, HBr, HCl, CF₄, SO₂, and SF₆—making it an ideal solution for high-purity applications.

Technical Specifications

Model Max Flow Rate Compatible Gases Removed Impurities Regenerable Operating Temp. Max Operating Pressure Housing Material
GPU HX 1000 slpm H₂, D₂, N₂, Ar, He, Ne, Kr, Xe, H₂/N₂ H₂O, O₂, CO, CO₂ < 100 ppt Yes 0–65°C 1.2 MPa (12 bar) 316L Stainless Steel
GPU IX 1000 slpm N₂, Ar, He, Kr, Ne, Xe, CF₄, CH₄, C₂H₆, C₃H₈, C₄H₁₀ H₂O, O₂, CO, CO₂, H₂ < 100 ppt; Sulfur Compounds < 1 ppb Yes 0–65°C 1.2 MPa (12 bar) 316L Stainless Steel
GPU YX 1000 slpm NH₃, C₂H₄, GeH₄, CSiH₆, C₂H₇N, C₃H₆, SF₆, H₂/SiH₄ H₂O, O₂, CO₂, Hydrocarbons >C₄, Metals < 1 ppb Yes 0–65°C 1.2 MPa (12 bar) 316L Stainless Steel
GPU CX 1000 slpm HCl, Cl₂ Organics, Metals, H₂O < 15 ppb No 0–65°C 1.2 MPa (12 bar) 316L Stainless Steel
GPU CO 1000 slpm CO H₂O, O₂, CO₂ < 1 ppb No 0–65°C 1.2 MPa (12 bar) 316L Stainless Steel

Key Features

  • Ultra-high Purity: Removes impurities down to ppt levels, ensuring the highest gas quality.

  • Broad Gas Compatibility: Suitable for inert, corrosive, and specialty gases.

  • Robust Design: Built with corrosion-resistant 316L stainless steel, rated for high temperature and pressure.

  • No Power Required: Operates at ambient temperature without external energy input.

  • Regenerable Options: Select models offer regeneration capability, reducing operational costs and environmental impact.

Benefits

  • Enhanced Process Performance: Guarantees gas purity, minimizing contamination risk.

  • Cost Efficiency: Long service life and regenerability lower maintenance and replacement expenses.

  • Safe & Flexible Installation: Horizontal or vertical mounting options fit various equipment layouts.

Applications

  • Semiconductor Manufacturing: Photolithography, epitaxy, dry etching, wafer growth, and deposition.

  • Data Storage: Provides ultra-clean gas environments for storage device fabrication.

  • Flat Panel Display & LED: Ensures high-purity gases for display and lighting production.

  • Solar Energy: Supports clean gas processes in solar panel and photovoltaic cell manufacturing.

 

 

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-purifiers/GateKeeper-GPU-Gas-Purifiers/p/GateKeeperGPUGasPurifiers?industry=

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