MKS gas analyzers employ Mass Spectrometry, Fourier Transform Infrared (FTIR), Nondispersive Infrared (NDIR), or Tunable Filter Spectroscopy to analyze gas composition.
Sensitive and Reproducible Gas Process Monitoring & Control
Our wide range of powerful, versatile, and proven mass spectrometry-based solutions deliver a new level of understanding and control in vacuum and gas-related applications to customers.
The Process Sense endpoint sensor is a small, low-cost SiF4 sensor specifically designed for Remote Plasma Chamber Clean Endpoint detection for silicon-based CVD deposition chambers.

Link: https://www.mksinst.com/c/optical-gas-analyzers