Microelectronics Pumps (Solvent Applications)


The Levitronix® BPS anti-static pumps are designed for ultrapure processing of delicate solvents in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down. The conductive wet material is available in either stainless steel or PTFE with carbon fiber additives.
**The Purest Pump
Proven by industry experience
Since there is no mechanical coupling between the impeller and the pump head casing, there is no wear and therefore virtually no particle generation.
*** ery Low Trace Metal Contamination
Significantly lower than air-operated pumps
The wet surface area of a Levitronix® pump is several times smaller than that of a pneumatic pump of comparable hydraulic power.


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