CHEMIACAL & SEMICONDUCTOR PROCESS REFRACTOMETER – Polaris™ PR53S

Chemical & Semiconductor Process Refractometer – Polaris™ PR53S

Product Overview

The Vaisala Polaris™ PR53S is an advanced concentration measurement instrument specifically designed for semiconductor manufacturing processes and ultra-pure chemical applications.

Technical Specifications

• Measurement Performance

  • Refractive Index Range: 1.32–1.53 nD (equivalent to 0–100 °Bx)
  • Accuracy: ±0.0002 nD (equivalent to ±0.1 °Bx)
  • Repeatability: ±0.0000033 nD
  • Resolution: ±0.000001 nD
  • Response Time (T63): 10 seconds with standard low-pass filter
  • Measurement Cycle: 1 measurement per second
  • Long-Term Stability: Maximum drift of only 0.1% of full scale per year

  Temperature Specifications

  • Temperature Accuracy (at +20 °C): ±0.3 °C
  • Sensor Type: Class F0.15 IEC 60751
  • Process Temperature Range: -20 °C to +85 °C
  • Ambient Operating Temperature: -20 °C to +45 °C

  Pressure & Protection

  • Operating Pressure: Up to 10 bar at 20 °C and 4.5 bar at 130 °C
  • Ingress Protection Rating: IP66 and IP67

  Wetted Materials

  • Prism and Prism Disc: Single-crystal Sapphire (99.996% Al₂O₃)
  • Flow Cell: Ultra-pure PTFE
  • Prism Gasket: Modified PTFE
  • Process Gasket: Kalrez® W240UP

  Non-Wetted Materials

  • Housing Material: PVDF plastic

  Process Connections

  Supports Pillar and Flare fittings for tubing sizes ranging from ¼ inch to 1 inch.

  Electrical Specifications

  • Power Supply: 24 VDC nominal (9–30 VDC operating range)
  • Power Consumption: Less than 1 W

  Outputs & Connectivity

  • Analog Output: Isolated 4–20 mA with HART 7 compatibility
  • Digital Output: RS-485 with Modbus RTU protocol

  Compatibility

  The PR53S can be connected directly or integrated with:

  • Vaisala Indigo520 Transmitter
  • Vaisala Indigo80 Handheld Indicator
  • Vaisala Insight PC Software

  for advanced monitoring, configuration, and data management.

Key Features

🔹 Ultra-Pure and Chemically Resistant Construction

Featuring fully non-metallic wetted parts made from ultra-pure PTFE and sapphire, the PR53S is engineered to withstand highly corrosive chemicals and contamination-sensitive semiconductor environments.

🔹 Reliable Accuracy Unaffected by Process Impurities

Advanced refractive index (RI) measurement technology ensures stable and accurate readings regardless of bubbles, suspended particles, or liquid color variations.

🔹 Optimized Inline Installation Design

With no moving parts, the PR53S minimizes maintenance requirements and maximizes operational reliability. Its compact design fits seamlessly into process lines ranging from ¼ to 1 inch using various connection options, including Flare and Pillar fittings.

🔹 Smart Connectivity Ecosystem

Easily integrate with Vaisala Indigo520 transmitters or Indigo80 handheld devices for real-time process monitoring, graphical data visualization, and rapid configuration through Vaisala Insight software.

Benefits

✔ Enhanced Safety and Operational Reliability

Provides safe and dependable concentration measurement in aggressive chemical environments while reducing risks for operators and production facilities.

✔ Process Optimization

Real-time measurement data enables accurate process control and faster decision-making, improving product quality and manufacturing efficiency.

✔ Lower Maintenance Costs

The robust, maintenance-free design significantly reduces service requirements, downtime, and replacement costs over the product lifecycle.

Applications

The Vaisala Polaris™ PR53S is ideal for a wide range of semiconductor and high-purity chemical processing applications, including:

✅ Chemical Blending Processes

✅ Cleaning Processes

✅ Etching Processes

✅ Chemical Mechanical Planarization (CMP)

✅ Chemical Concentration Monitoring

✅ Process Control and Quality Assurance

✅ High-Purity Chemical Manufacturing

Contact Us

Interested in learning how the Vaisala Polaris™ PR53S can improve your semiconductor manufacturing process?

Contact Filterfine Vietnam today for expert consultation and the latest promotional offers.

Contact: https://filterfinevn.com/lien-he/

Reference: https://www.vaisala.com/en/products/vaisala-polaristm-pr53s-semicon-process-refractometer