Ultra clean pump system BPS-200

BPS-200 Ultra-Clean Pump System

Product Introduction

BPS-200 is a pump system specifically designed for handling ultra-clean liquids in microelectronic applications. Based on active magnetic technology, the pump impeller is suspended and driven by the magnetic field of the motor, ensuring no mechanical contact between moving parts, eliminating wear and leakage. Both the impeller and pump casing are made of high-purity fluoropolymer resin with excellent chemical resistance.​

Specifications

• Maximum flow: 21 liters/minute (5.5 gallons/minute)​
• Maximum differential pressure: 2.6 bar (37.7 psi)​
• Maximum liquid temperature: 90°C (194°F)​
• Liquid contact material: High purity fluoropolymer resin
• Control interface: RS232 and PLC interface

Outstanding features

• No abrasion and no leakage.​
• High purity.
• High reliability.​
• Precise control.​
• Integrated design.

Benefits of use

• No mechanical contact between moving parts minimizes particle generation.​
• No bearings or mechanical seals to replace, minimizing maintenance needs and associated costs.​
• Precise control of flow and pressure optimizes manufacturing processes and improves efficiency.​
• The integrated design minimizes installation space, making it suitable for production environments with limited space.​

Applications

• The BPS-200 is ideal for ultra-clean liquid handling applications in the microelectronics industry, including:​
• Chemical processing in semiconductor manufacturing.​
• Wafer cleaning process.​
• Liquid handling in flat panel display manufacturing.​
• Any application that requires high-purity liquid transportation and precise control.

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Reference link: https://www.levitronix.com/product/pumps/bps-200/