VAISALA K-Patents Refractometer For Semiconductor Process

VAISALA K-Patents Refractometer For Semiconductor Process

Semiconductor wafer and microelectronics fabrication is a demanding process with little room for mistakes. The industry depends on high-performing monitoring and measurement instrumentation for precise chemical compositions and atmospheric conditions. We offer semicon process refractometers for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking and polishing processes; as well as instruments for measuring humidity, dew point, temperature and pressure within and surrounding the semiconductor tools and facilities
Vaisala K-PATENTS® process refractometer is designed to measure and indicate inline liquid concentration of almost any chemical or compound.

Chip quality in semiconductor fabrication processes is typically defined as the reduction of variability around target, or in other words, how well the distribution sets between the lower and upper specified limits. Critical to Quality (CTQ) and conformance to customer requirements also play a significant role. Too high variability in manufacturing quickly turns to product quality issues. To ensure a stable supply of good products to market, thorough quality metrics and process control are needed. One important part of product quality and manufacturing is chemistry. Semiconductor wafer plants consume tons of chemicals throughout the whole fab process. Repeatability and reproducibility of each process is a top concern of fabs, and even the slightest deviation from specification can result in expensive equipment contamination and wafer scrap