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Fluorogard® RS Filter Cartridge

Product Overview

The Fluorogard® RS filter from Entegris is a high-performance liquid filtration solution designed to remove solid particles and contaminants in semiconductor manufacturing, flat panel display production, and other industrial applications. Featuring a pleated PTFE membrane structure and durable PFA hardware, this filter delivers outstanding filtration efficiency and long service life.

Technical Specifications

Model Filtration Rating (µm) Membrane Area (cm²) Membrane Material Structure Material Max Operating Pressure @ 25°C Max Operating Temperature
RS-T 0.05 / 0.1 / 0.2 13,000 Optimized PTFE PFA 0.34 MPa (3.4 bar) 180°C
RS-M 0.05 / 0.1 / 0.2 6,500 PTFE with PTFE prefilter PFA 0.34 MPa (3.4 bar) 180°C
P-RS 40 14,000 Nonwoven PTFE (Prefilter) PFA 0.34 MPa (3.4 bar) 180°C

Key Features

  • Multi-layer Membrane Technology: Enhances removal of contaminants such as films, gels, and particulates in both single-pass and recirculation filtration systems.

  • Optimized Pleated Design: Expands filtration area, improving flow efficiency and filter lifespan.

  • Durable PFA Construction: Offers superior mechanical strength and chemical resistance, compatible with aggressive fluids.

  • Optional P-RS Prefilter: Efficiently removes larger particles ahead of the main filter, extending overall system life.

User Benefits

  • High Filtration Efficiency: Effectively captures particles and impurities, ensuring high product quality.

  • Long Service Life: Pleated structure and high-quality materials prolong filter operation time.

  • Cost-effective: Reduces replacement frequency and operational costs.

  • Easy Integration: Compatible with various connection types and existing systems.

Applications

The Fluorogard® RS filter is widely used in:

  • Semiconductor Industry: Filtration of liquids used in chip and electronic component manufacturing.

  • Flat Panel Display Industry: Filtration in the production of LCD and OLED screens.

  • Chemical Industry: Purification of chemical solutions and electronic-grade material processing.

 

 

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Reference link: https://www.entegris.com/shop/en/USD/products/liquid-filtration-and-purification/liquid-filters/Fluorogard-RS-Filter/p/FluorogardRSFilter?industry=

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