VAISALA K-Patents Refractometer For Semiconductor Process

K-PATENTS® PR-33-S Refractometer for the Semiconductor Industry

Product Overview

The Vaisala K-PATENTS® PR-33-S is a digital refractometer specially designed for liquid chemical processes in the semiconductor industry. Featuring a compact, all non-metal construction made from ultra-pure PTFE, it provides accurate, reliable measurements in cleanroom environments. Ideal for monitoring critical processes such as mixing, cleaning, etching, and CMP, the PR-33-S meets the stringent demands of advanced semiconductor manufacturing.

Technical Specifications

• Sensor body material: Ultra-pure, non-metallic PTFE.

• Process connection: Compatible with ¼” to 1” piping via flare or pillar fittings.

• Refractive index (nD) range: 1.3200 – 1.5300 (corresponds to 0–100% by weight).

• Optional range for strong HF: nD 1.2600 – 1.4700.

• Accuracy: ±0.0002 nD (approx. ±0.1% by weight).

• Process temperature: -20°C to +85°C.

• Temperature sensor: Integrated Pt1000 with automatic temperature compensation.

• Communication: Ethernet (UDP/IP), PoE supported.

• Calibration: Factory-calibrated to NIST standards; no re-calibration required.

Key Features

• Precise and stable measurement – Unaffected by particles, bubbles, turbulence, or trace impurities (PPM level).
• Compact design – Easily installed directly into process lines, ideal for space-constrained environments.
• Digital communication – Continuous data transfer via Ethernet; supports remote monitoring and control.
• Low maintenance – Drift-free performance, no moving parts, and no need for recalibration.
• CORE-optics technology – Patented design (US6067151) ensures superior optical performance.

Benefits

• Process optimization – Real-time concentration monitoring improves efficiency and extends bath life.
• High product quality – Accurate chemical control ensures reliability and consistency in final products.
• Cost savings – Maintenance-free operation reduces downtime and total cost of ownership.
• Compliance with cleanroom standards – All non-metallic, ultra-pure construction meets the industry’s strictest cleanliness and safety requirements.

Applications

• Semiconductor manufacturing – Monitoring chemical concentrations in mixing, cleaning, etching, and CMP processes.

• Cleanroom environments – Provides reliable measurements under ultra-clean conditions.

• Liquid chemical processes – Controls the concentration of chemical solutions in production and treatment.

Contact us now for detailed advice and promotions!
https://filterfinevn.com/lien-he/

Reference link: https://www.vaisala.com/en/products/instruments-sensors-and-other-measurement-devices-instruments-industrial-measurements-liquid-concentration/semicon-refractometer/pr-33-s