ULTRAPURE PUMP SYSTEM BPS-i30 SERIES

Ultrapure Pump System BPS-i30 Series

Product Introduction

The BPS-i30 series ultra clean pump system is a pump system designed by Levitronix (Switzerland) specifically for ultra clean processing in microelectronic applications. Based on active magnetic technology, the pump impeller is suspended and driven by the motor’s magnetic field, ensuring no mechanical contact between moving parts, thus eliminating wear. Both the impeller and pump casing are made of high purity fluoropolymer resin with excellent chemical resistance.​

Specifications

Key Features

• No Wear and No Leakage.
• High Purity.
• High Reliability.
• Precision Control.
• Compact design.

Benefits of use

• No mechanical contact between moving parts minimizes particle generation.
• No bearings or mechanical seals to replace, minimizing maintenance needs and associated costs.
• Precise control of flow and pressure optimizes manufacturing processes and improves efficiency.
• The integrated design minimizes installation space, making it suitable for production environments with limited space.

Applications

• The BPS-i30 series is ideal for ultra-clean liquid handling applications in the microelectronics industry, including.
• Chemical processing in semiconductor manufacturing
• Wafer cleaning processes
• Liquid handling in flat panel display manufacturing

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Reference link: https://www.levitronix.com/media-center/technical-brochure-bps-i30/