Wafergard® MAX-1000 In-line PTFE GAS FILTER

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Wafergard® MAX-1000 In-line PTFE Gas Filter


Product Overview

The Wafergard® MAX-1000 In-line PTFE Gas Filter is a high-performance gas filtration solution developed by Entegris. It features a hydrophobic PTFE membrane supported by a molded PFA structure and housed in 316L stainless steel. Designed to remove ultrafine particles in ultra-high-purity (UHP) gas applications, this filter is especially suited for processes using gases such as SiCl₄, GeCl₄, and POCl₃, commonly found in optical fiber and silica glass manufacturing.


Technical Specifications

Product Code Connection Type Length (mm) Internal Surface Finish (Ra) Max Operating Pressure Max Operating Temperature Particle Retention Efficiency
WGMXLBSS4 1/2″ Swagelok® compatible, male inlet/outlet 118.7 ≤25 μin 9.8 bar (142 PSIG) 120°C (248°F) ≥99.9999999%
WGMXLPRR6 3/4″ VCR® compatible, male inlet/outlet 158.8 ≤7 μin 9.8 bar (142 PSIG) 120°C (248°F) ≥99.9999999%

Note: Filtration efficiency is rated at ≥99.9999999% for particles ≥0.0015 µm.


Key Features

  • Superior Particle Filtration: Removes ≥99.9999999% of particles ≥0.0015 µm, ensuring ultra-clean gas output.

  • High-Quality Materials: Hydrophobic PTFE membrane supported by a molded PFA structure and housed in electropolished 316L stainless steel.

  • Expanded Filtration Area: Offers up to 3 times larger filtration area than previous generations, reducing pressure drop and increasing gas flow.

  • Extended Service Life: Lasts up to 3 times longer, lowering total cost of ownership.

  • Compact Design: Comparable in length to existing filters, allowing easy integration into current systems without redesign.


User Benefits

  • Assured Gas Purity: Minimizes contamination risk during production.

  • Enhanced System Performance: Reduces startup time and maintains consistent gas flow.

  • Reduced Maintenance Costs: Long service life and stable performance reduce replacement frequency.

  • High Compatibility: Suitable for a wide range of gases and standard connection systems.


Applications

  • SiCl₄, GeCl₄, and POCl₃ Gas Filtration: Ensures ultra-high purity gases for optical fiber and silica glass production.

  • Semiconductor Industry: Ideal for UHP gas filtration in microchip manufacturing.

  • Industrial Use: Compatible with systems utilizing inert gases, reactive gases, and ozone.

 

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-ptfe-gas-filters/Wafergard-MAX-HT-In-line-Gas-Filters/p/WafergardMAXHTInlineGasFilters

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