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Wafergard® MAX-1000 In-line PTFE GAS FILTER
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Wafergard® MAX-1000 In-line PTFE Gas Filter
Product Overview
The Wafergard® MAX-1000 In-line PTFE Gas Filter is a high-performance gas filtration solution developed by Entegris. It features a hydrophobic PTFE membrane supported by a molded PFA structure and housed in 316L stainless steel. Designed to remove ultrafine particles in ultra-high-purity (UHP) gas applications, this filter is especially suited for processes using gases such as SiCl₄, GeCl₄, and POCl₃, commonly found in optical fiber and silica glass manufacturing.
Technical Specifications
Product Code | Connection Type | Length (mm) | Internal Surface Finish (Ra) | Max Operating Pressure | Max Operating Temperature | Particle Retention Efficiency |
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WGMXLBSS4 | 1/2″ Swagelok® compatible, male inlet/outlet | 118.7 | ≤25 μin | 9.8 bar (142 PSIG) | 120°C (248°F) | ≥99.9999999% |
WGMXLPRR6 | 3/4″ VCR® compatible, male inlet/outlet | 158.8 | ≤7 μin | 9.8 bar (142 PSIG) | 120°C (248°F) | ≥99.9999999% |
Note: Filtration efficiency is rated at ≥99.9999999% for particles ≥0.0015 µm.
Key Features
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Superior Particle Filtration: Removes ≥99.9999999% of particles ≥0.0015 µm, ensuring ultra-clean gas output.
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High-Quality Materials: Hydrophobic PTFE membrane supported by a molded PFA structure and housed in electropolished 316L stainless steel.
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Expanded Filtration Area: Offers up to 3 times larger filtration area than previous generations, reducing pressure drop and increasing gas flow.
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Extended Service Life: Lasts up to 3 times longer, lowering total cost of ownership.
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Compact Design: Comparable in length to existing filters, allowing easy integration into current systems without redesign.
User Benefits
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Assured Gas Purity: Minimizes contamination risk during production.
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Enhanced System Performance: Reduces startup time and maintains consistent gas flow.
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Reduced Maintenance Costs: Long service life and stable performance reduce replacement frequency.
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High Compatibility: Suitable for a wide range of gases and standard connection systems.
Applications
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SiCl₄, GeCl₄, and POCl₃ Gas Filtration: Ensures ultra-high purity gases for optical fiber and silica glass production.
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Semiconductor Industry: Ideal for UHP gas filtration in microchip manufacturing.
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Industrial Use: Compatible with systems utilizing inert gases, reactive gases, and ozone.
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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-ptfe-gas-filters/Wafergard-MAX-HT-In-line-Gas-Filters/p/WafergardMAXHTInlineGasFilters
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