GateKeeper® GPU Gas Purification Unit – High-Purity Gas Filtration Solution from Entegris

Friday November 28th, 2025
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1. Introduction to GateKeeper® GPU

The GateKeeper® GPU Gas Purification Unit from Entegris is a high-purity gas purifier specifically engineered to remove critical contaminants from process gas lines used in industrial manufacturing—especially semiconductor fabrication, microelectronics, LED production, and other high-precision applications.

GateKeeper® GPU ensures ultra-high gas purity, stabilizes process performance, extends equipment lifetime, and reduces operational costs thanks to its regenerable design and long-lasting filtration efficiency.

2. Key Features of the GateKeeper® GPU

• Ultra-high purity performance (ppt–ppb levels)

Effectively removes volatile metal contaminants, moisture, and fine particulates to achieve extremely low impurity concentrations.

• Compatible with a wide range of gases

Supports both inert and corrosive gases such as Cl₂, HBr, HCl, CF₄, SO₂, SF₆, and more.

• High flow capacity with low pressure drop

Optimized internal design ensures efficient gas flow with minimal pressure loss, improving system performance.

• Premium, corrosion-resistant materials

Constructed with 316L stainless steel, offering excellent corrosion resistance and leak integrity.

• No external heat required

Operates at ambient temperature, eliminating the need for heaters or additional power sources.

• Regenerable design

Many GPU models support media regeneration, reducing replacement costs and minimizing waste.

• Certified for safety and reliability

Compliant with CE – Pressure Equipment Directive (PED) and manufactured under ISO 9001 quality standards.

• Flexible installation

Non-directional operation allows horizontal or vertical mounting, easing integration into existing industrial gas line systems.

3. GateKeeper® GPU Media Options

Entegris offers various purifier media types to suit different gases and contamination control requirements:

Media Model Suitable Gas / Application Performance Characteristics
AP Media Hydride gases (AsH₃, PH₃) Removes moisture and metals to <1 ppbV purity.
CX Media HCl, Cl₂ High efficiency for volatile metals (Cr, Ni, etc.) and organic contaminants.
BX Media HBr Moisture removal <1 ppbV; features fine Wafergard® Nickel filtration.
FX Media HF Removes moisture and metals at ppb levels; high-pressure, durable media design.
LG Media High-purity gases (N₂, Ar, O₂, H₂, He…) Removes volatile acids/bases, organics, and metals to ppt-level purity.
WY Media Multi-gas applications in microelectronics Long media lifetime, high adsorption efficiency, low pressure drop.

4. Benefits of Using GateKeeper® GPU in Industrial Environments

1. Enhanced productivity & process quality

  • Ultra-pure gas reduces metal contamination and defects in semiconductor production.
  • Ensures consistency across all gas-involved process steps, improving yield and device reliability.

2. Lower operational & maintenance costs

  • Regenerable purifier media significantly reduces replacement frequency.
  • No heating required → lower energy consumption than heater-based purifiers.

3. Long service life & strong durability

  • High-quality stainless-steel construction and specialty absorber media ensure long-term stability.
  • Flexible installation orientation supports diverse gas system layouts.

4. Safety & compliance

  • CE PED certification ensures safe operation under pressure.
  • High leak-tightness minimizes the risk of exposure to harmful or corrosive gases.

5. Typical Applications of GateKeeper® GPU

  • Semiconductor manufacturing: gas delivery for etching, deposition (CVD/PECVD), cleaning, and tool operation.
  • LED production: maintains ultra-clean gas supply for epitaxy and wafer processing.
  • Data storage & optical device manufacturing: prevents metal contamination that may compromise precision components.
  • Advanced research facilities and high-tech industries: any environment requiring highly stable, ultra-pure process gases.

6. Why Choose Filterfine Việt Nam as Your GateKeeper® GPU Supplier

  • Authorized distributor of Entegris in Vietnam, ensuring authentic products with full quality assurance.
  • Expert technical consulting: our engineers specialize in gas systems and microcontamination control, helping customers select the correct GPU model and media based on gas type, pressure, and flow requirements.
  • Comprehensive after-sales support: regeneration service, leak testing, maintenance, and replacement purifier elements.
  • Complete documentation: datasheets, CO/CQ certificates, and safety guidelines to support system validation and QA compliance.

7. Conclusion

The GateKeeper® GPU Gas Purifier from Entegris is the ideal solution for industrial gas systems requiring ultra-high purity, long-term stability, and cost-effective operation. With its ability to remove moisture, volatile metals, and other critical contaminants, the GPU protects sensitive manufacturing processes in industries such as semiconductors, optics, and advanced electronics.

👉 Contact Filterfine Việt Nam today for expert consultation on choosing the right GPU model and purifier media, and receive a detailed quotation and technical support.

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