Wafergard® III NF-75 In-line Gas Filter

Product Introduction

The Wafergard® III NF-75 In-line gas filter is a high-performance, ultra-clean filtration solution, specifically engineered for gas systems requiring exceptional purity and durability. With its all-metal construction and proprietary sintered nickel membrane, this product is built to meet the stringent demands of the semiconductor, electronics, and chemical industries.

Technical Specifications

Key Features

• Proprietary Nickel Membrane: Enables ultra-fine particle filtration ≥0.0015 µm with up to 9 LRV removal efficiency.

• All-Metal Construction: Delivers superior durability, heat resistance, and corrosion protection.

• Exceptional Cleanliness: Ensures filtered gas contains fewer than 0.03 particles per liter, suitable for high-purity applications.

• High Temperature and Pressure Capability: Operates reliably up to 400°C and 70 bar.

Benefits

• Ensures Gas Purity: Minimizes contamination risk in sensitive manufacturing processes.

• Extends Equipment Life: Protects downstream components from particulates and contaminants, prolonging service life.

• Reduces Maintenance Frequency: High durability and consistent performance reduce replacement and service intervals.

Applications

• Ultra-Clean Gas Systems: Ideal for use in semiconductor, flat panel display, LED, and solar manufacturing plants.

• High-Temperature Applications: Suitable for processes requiring elevated temperatures and pressures.

• Gas Distribution Systems: Commonly used in valve-manifold boxes and bulk gas distribution setups.

• Fluoropolymer Filter Replacement: An upgrade from conventional fluoropolymer filters for improved filtration efficiency.

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-nickel-gas-filters/Wafergard-III-NF-75-In-line-Gas-Filters/p/WafergardIIINF75InLineGasFilters