Wafergard® III NF-750 In-line Gas Filter

Product Introduction

The Wafergard® III NF-750 In-line gas filter is a high-performance, ultra-clean filtration solution specifically designed for gas systems that demand exceptional purity and durability. Featuring an all-metal construction and proprietary sintered nickel membrane, this product meets the most stringent requirements in the semiconductor, electronics, and chemical industries.

Technical Specifications

Key Features

• Proprietary Nickel Membrane: Enables ultra-fine particle filtration ≥0.0015 µm with up to 9 LRV removal efficiency.

• All-Metal Construction: Enhances durability, heat resistance, and corrosion protection.

• Exceptional Cleanliness: Delivers gas purity with particle levels below 0.03 particles/liter, ideal for high-purity applications.

• High Heat and Pressure Tolerance: Operates reliably at temperatures up to 400°C and pressures up to 52 bar.

Benefits

• Ensures Gas Purity: Minimizes contamination risks in sensitive manufacturing processes.

• Extends Equipment Life: Protects downstream components from particles and impurities, increasing longevity.

• Reduces Maintenance Time: High durability and stable performance reduce the need for frequent replacements and maintenance.

Applications

• Ultra-High Purity Gas Systems: In semiconductor, flat panel display, LED, and solar manufacturing plants.

• High-Temperature Processes: Suitable for applications requiring elevated temperatures and pressures.

• Gas Distribution Systems: Used in valve manifold boxes and bulk gas distribution systems.

• Fluoropolymer Filter Replacement: Upgrade from existing fluoropolymer filters to achieve higher filtration performance.

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filter-and-purification/gas-filters/in-line-nickel-gas-filters/Wafergard-III-NF-750-In-line-Gas-Filters/p/WafergardIIINF750InlineGasFilters