Wafergard® II SF Mini/Mini XL In-line Gas Filter

Product Overview

The Wafergard® II SF Mini and Mini XL In-line Gas Filters from Entegris are ultra-high-purity (UHP) filters constructed entirely from 316L stainless steel, making them ideal for gas delivery systems requiring exceptional particle retention, high thermal stability, and pressure tolerance. These filters are especially suited for semiconductor and electronics manufacturing processes.

Technical Specifications

Key Features

• High Filtration Efficiency: Removes over 99.9999% (6 LRV) of particles ≥0.0015 µm at flow rates up to 30 slm (Mini) and 60 slm (Mini XL).

• Premium Material Construction: All 316L stainless steel housing and filter media, electropolished to a surface roughness of ≤5 µin Ra.

• Exceptional Cleanliness: Post-cleaned and high-temperature baked to achieve particle shedding ≤0.03 particles/liter (≥0.01 µm).

• High Pressure & Temperature Resistance: Operating pressure up to 16.2 MPa (162 bar) at 20°C and temperature up to 400°C with inert gases.

• Low Helium Leak Rate: Tested to 2 × 10⁻¹⁰ atm-cc/sec, ensuring system integrity.

User Benefits

• Protects Equipment: Reduces risk of particle-related damage, extending the life of downstream components.

• Enhances Process Yield: Maintains gas purity to minimize wafer defects and improve productivity.

• Space-Efficient: Compact design allows easy integration into existing systems.

• Reliable Performance: Delivers stable filtration even under extreme thermal and pressure conditions.

Applications

• Semiconductor Industry: Used in ultra-high-purity gas systems for wafer manufacturing.

• Electronics Industry: Ideal for gas delivery in sensitive electronic fabrication environments.

• Industrial Gas Systems: Suitable for inert and reactive gases (not recommended for O₃ applications).

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Reference link: https://www.entegris.com/shop/en/USD/products/gas-filtration-and-purification/gas-filters/in-line-stainless-steel-gas-filters/Wafergard-II-SF-Mini-Mini-XL-In-line-Gas-Filters/p/WafergardIISFMiniInLineGasFilters