Protego® Plus HT AND HTX PURIFIER

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Protego® Plus HT and HTX Purifiers

Product Introduction

The Protego® Plus HT and HTX purifiers from Entegris are advanced integrated filters/purifiers designed to effectively remove metal ions and submicron particles from DI water, meeting the stringent requirements of modern semiconductor manufacturing processes. With the ability to operate at temperatures up to 80°C and an advanced membrane design, this product ensures superior filtration performance and high durability.


Specifications

Product Code Membrane Type Particle Retention Length (inch) Membrane Area (m²) Max Operating Pressure @25°C Max Operating Temperature
PRHM01PQ1Y HTX 7 nm 10 0.93 0.27 MPa (2.7 bar; 40 psid) 80°C (176°F)
PRHE01PQ1YT HTX 1 nm 10 0.93 0.27 MPa (2.7 bar; 40 psid) 80°C (176°F)
PRH002PQ1Y HTX 7 nm 20 1.86 0.27 MPa (2.7 bar; 40 psid) 80°C (176°F)

Key Features

  • Water-repellent polysulfone membrane: Ensures high purity and excellent submicron particle retention.

  • High ion exchange capacity: Effectively removes metal ions, minimizing impurities in DI water.

  • Integrated design: Combines filtration and purification in a single unit, saving space and simplifying installation.

  • High-quality structural materials: Made with polypropylene and polyethylene to ensure durability and heat resistance.


Benefits

  • Improved production efficiency: Minimizes downtime and increases productivity.

  • Ensured product quality: Effectively removes impurities, ensuring the purity of DI water.

  • Operational cost savings: Long filter life reduces the frequency of replacements.

  • Easy integration: Flexible design that is compatible with various existing systems.


Applications

The Protego® Plus HT and HTX filters are widely used in:

  • Semiconductor industry: For filtering DI water in chip and electronic component manufacturing.

  • Flat panel display industry: For DI water filtration in LCD and OLED display production.

  • Chemical industry: For DI water filtration in chemical and electronic materials manufacturing.

 

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Reference link: https://www.entegris.com/shop/en/USD/products/liquid-filter-and-purification/liquid-purifiers/Protego-Plus-HT-and-HTX-Purifiers/p/ProtegoHTPurifier?industry=

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