Fluorogard® FP-HP Filter

Categories: ,

Point-of-tool, DI water filter with strong contaminant and metal ion retention and good flow-rate performance in greater than 180 nm technology nodes.
-Industry: Semiconductor, Data Storage, Flat Panel Display, Bulk Chemical, LED
-Process: Wet Etch and Clean, Bulk Chemical, Substrate Cleaning, Magnetic Head – Wet Etch and Clean, CDA, Organic layer printing, Bulk Gas Delivery
-Chemistry: Solvents, Aqueous Acids, Bases, Detergents, DI Water
-Installation Point: Point of Tool, Bulk, Facilities

*** Specifications:
– Membrane: Hydrophilic PTFE
– For 0.02 µm – prewet, nondewetting PTFE*
– Supports, core, sleeve and end caps: Polypropylene
– O-rings: EPDM, FKM, E-FKM
*Connections: Code 0 (AS568-222 o-rings)
*Retention rating: 0.05, 0.10, 0.20, 0.50, 1.0, 3.0, 10.0 µm, 10, 20 nm
*Membrane area: 10″: 7,000 cm² (7.54 ft²)
20″: 14,000 cm² (15.1 ft²)
30″: 21,000 cm² (22.6 ft²)
*Maximum operating conditions:
– Maximum forward/reverse differential pressure: 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
– Maximum operating temperature: 90°C (194°F)
* The prewet filter is enclosed in a bag containing DI water and 1% H₂O₂. After installation is completed, drain and flush with 20 liters of DI water (per 10”).


There are no reviews yet.

Only logged in customers who have purchased this product may leave a review.