{"id":2415,"date":"2025-10-17T14:55:33","date_gmt":"2025-10-17T07:55:33","guid":{"rendered":"https:\/\/filterfinevn.com\/?post_type=product&#038;p=2415"},"modified":"2025-10-17T15:04:10","modified_gmt":"2025-10-17T08:04:10","slug":"phot-dupont-kalrez-9100","status":"publish","type":"product","link":"https:\/\/filterfinevn.com\/en\/product\/phot-dupont-kalrez-9100\/","title":{"rendered":"DuPont\u2122 Kalrez\u00ae 9100"},"content":{"rendered":"<p><\/p>\n<p data-start=\"263\" data-end=\"629\">In the semiconductor and microchip manufacturing industry, sealing materials must withstand extreme plasma environments, minimize particle generation, and maintain long-term sealing integrity.<br data-start=\"455\" data-end=\"458\" \/><strong data-start=\"458\" data-end=\"482\">DuPont\u2122 Kalrez\u00ae 9100<\/strong> is specially engineered to meet these demanding requirements \u2014 delivering superior durability, extended service life, and ultra-clean performance.<\/p>\n<h3 data-start=\"636\" data-end=\"678\"><strong data-start=\"640\" data-end=\"678\">Key Features of Kalrez\u00ae 9100 Seals<\/strong><\/h3>\n<ul data-start=\"680\" data-end=\"1175\">\n<li data-start=\"680\" data-end=\"783\">\n<p data-start=\"682\" data-end=\"783\"><strong data-start=\"682\" data-end=\"731\">Low erosion and ultra-low particle generation<\/strong> in oxygen and fluorine-based plasma environments.<\/p>\n<\/li>\n<li data-start=\"784\" data-end=\"884\">\n<p data-start=\"786\" data-end=\"884\"><strong data-start=\"786\" data-end=\"839\">Outstanding resistance to dry process chemistries<\/strong>, ideal for harsh plasma etching processes.<\/p>\n<\/li>\n<li data-start=\"885\" data-end=\"982\">\n<p data-start=\"887\" data-end=\"982\"><strong data-start=\"887\" data-end=\"918\">Excellent thermal stability<\/strong>, performing reliably at temperatures up to <strong data-start=\"962\" data-end=\"979\">300\u00b0C (572\u00b0F)<\/strong>.<\/p>\n<\/li>\n<li data-start=\"983\" data-end=\"1075\">\n<p data-start=\"985\" data-end=\"1075\"><strong data-start=\"985\" data-end=\"1008\">Very low outgassing<\/strong> and <strong data-start=\"1013\" data-end=\"1040\">ultra-low metal content<\/strong>, minimizing contamination risks.<\/p>\n<\/li>\n<li data-start=\"1076\" data-end=\"1175\">\n<p data-start=\"1078\" data-end=\"1175\"><strong data-start=\"1078\" data-end=\"1103\">High elastic recovery<\/strong> and <strong data-start=\"1108\" data-end=\"1131\">low compression set<\/strong>, ensuring long-lasting sealing integrity.<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1177\" data-end=\"1330\">All Kalrez\u00ae 9100 parts are <strong data-start=\"1204\" data-end=\"1234\">ultra-cleaned and packaged<\/strong> in a controlled environment to meet the stringent purity standards of semiconductor cleanrooms.<\/p>\n<h3 data-start=\"1337\" data-end=\"1365\"><strong data-start=\"1341\" data-end=\"1365\">Typical Applications<\/strong><\/h3>\n<ul data-start=\"1367\" data-end=\"1558\">\n<li data-start=\"1367\" data-end=\"1401\">\n<p data-start=\"1369\" data-end=\"1401\">PECVD \/ ALD chamber door seals<\/p>\n<\/li>\n<li data-start=\"1402\" data-end=\"1427\">\n<p data-start=\"1404\" data-end=\"1427\">Isolation valve seals<\/p>\n<\/li>\n<li data-start=\"1428\" data-end=\"1464\">\n<p data-start=\"1430\" data-end=\"1464\">Slit valve and bonded door seals<\/p>\n<\/li>\n<li data-start=\"1465\" data-end=\"1494\">\n<p data-start=\"1467\" data-end=\"1494\">Process chamber lid seals<\/p>\n<\/li>\n<li data-start=\"1495\" data-end=\"1558\">\n<p data-start=\"1497\" data-end=\"1558\">Poppet valve seals and other selective dynamic applications<\/p>\n<\/li>\n<\/ul>\n<h3 data-start=\"1565\" data-end=\"1620\"><strong data-start=\"1569\" data-end=\"1620\">Proven Performance in Global Semiconductor Fabs<\/strong><\/h3>\n<p data-start=\"1622\" data-end=\"1756\">Leading semiconductor fabs in the <strong data-start=\"1656\" data-end=\"1664\">U.S.<\/strong> and <strong data-start=\"1669\" data-end=\"1679\">Europe<\/strong> have reported <strong data-start=\"1694\" data-end=\"1719\">2\u20133X longer seal life<\/strong> after switching to <strong data-start=\"1739\" data-end=\"1755\">Kalrez\u00ae 9100<\/strong>:<\/p>\n<ul data-start=\"1758\" data-end=\"2174\">\n<li data-start=\"1758\" data-end=\"1932\">\n<p data-start=\"1760\" data-end=\"1932\"><strong data-start=\"1760\" data-end=\"1801\">U.S. Fab (Metal Etch \/ Resist Strip):<\/strong> Preventive maintenance (PM) cycle extended from <strong data-start=\"1850\" data-end=\"1875\">400 to 1,200 RF hours<\/strong>, with no signs of cracking or performance degradation.<\/p>\n<\/li>\n<li data-start=\"1933\" data-end=\"2039\">\n<p data-start=\"1935\" data-end=\"2039\"><strong data-start=\"1935\" data-end=\"1960\">European Fab (PECVD):<\/strong> Processed over <strong data-start=\"1976\" data-end=\"1993\">54,000 wafers<\/strong> with no evidence of erosion or deformation.<\/p>\n<\/li>\n<li data-start=\"2040\" data-end=\"2174\">\n<p data-start=\"2042\" data-end=\"2174\"><strong data-start=\"2042\" data-end=\"2074\">Slit Valve Door Application:<\/strong> Operating cycle increased from <strong data-start=\"2106\" data-end=\"2124\">60 to 180 days<\/strong>, maintaining perfect sealing with zero leakage.<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2176\" data-end=\"2402\">Kalrez\u00ae 9100 outperforms conventional FFKM seals containing fillers such as carbon black or metal oxides. Its <strong data-start=\"2286\" data-end=\"2313\">filler-free formulation<\/strong> minimizes contamination risks and ensures exceptional plasma resistance and reliability.<\/p>\n<h3 data-start=\"2409\" data-end=\"2448\"><strong data-start=\"2413\" data-end=\"2448\">Why Choose DuPont\u2122 Kalrez\u00ae 9100<\/strong><\/h3>\n<p data-start=\"2450\" data-end=\"2652\">\u2705 Up to <strong data-start=\"2458\" data-end=\"2481\">3X longer seal life<\/strong><br data-start=\"2481\" data-end=\"2484\" \/>\u2705 Reduced downtime and maintenance costs<br data-start=\"2524\" data-end=\"2527\" \/>\u2705 Minimized particle contamination for ultra-clean processes<br data-start=\"2587\" data-end=\"2590\" \/>\u2705 Reliable sealing performance under harsh plasma conditions<\/p>\n<h3 data-start=\"2659\" data-end=\"2735\"><strong data-start=\"2663\" data-end=\"2735\">Contact Filterfine Vietnam \u2013 Official Distributor of DuPont\u2122 Kalrez\u00ae<\/strong><\/h3>\n<p data-start=\"2737\" data-end=\"2959\">Filterfine Vietnam is the <strong data-start=\"2763\" data-end=\"2808\">authorized distributor of DuPont\u2122 Kalrez\u00ae<\/strong> in Vietnam, providing <strong data-start=\"2831\" data-end=\"2874\">high-performance FFKM sealing solutions<\/strong> and <strong data-start=\"2879\" data-end=\"2902\">technical expertise<\/strong> for semiconductor, plasma, and corrosive environments.<\/p>\n<p data-start=\"2961\" data-end=\"3153\">\ud83c\udf10 <strong data-start=\"2964\" data-end=\"2976\">Website:<\/strong> <a class=\"decorated-link\" href=\"https:\/\/filterfinevn.com\/\" target=\"_new\" rel=\"noopener\" data-start=\"2977\" data-end=\"3029\">https:\/\/filterfinevn.com<\/a><br data-start=\"3029\" data-end=\"3032\" \/>\ud83d\udcde <strong data-start=\"3035\" data-end=\"3047\">Hotline:<\/strong> 0961.152.844<br data-start=\"3060\" data-end=\"3063\" \/>\ud83d\udcac <strong data-start=\"3066\" data-end=\"3078\">Zalo OA:<\/strong> <a class=\"decorated-link\" href=\"https:\/\/zalo.me\/3662661132832477703\" target=\"_new\" rel=\"noopener\" data-start=\"3079\" data-end=\"3153\">https:\/\/zalo.me\/3662661132832477703<\/a><\/p>\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p class=\"qtranxs-available-languages-message qtranxs-available-languages-message-en\">Sorry, this entry is only available in <a href=\"https:\/\/filterfinevn.com\/vi\/wp-json\/wp\/v2\/product\/2415\" class=\"qtranxs-available-language-link qtranxs-available-language-link-vi\" title=\"Ti\u1ebfng Vi\u1ec7t\">Ti\u1ebfng Vi\u1ec7t<\/a>.<\/p>\n","protected":false},"featured_media":2409,"comment_status":"open","ping_status":"closed","template":"","meta":[],"class_list":["post-2415","product","type-product","status-publish","has-post-thumbnail","hentry","product_cat-phot-gioang-cao-su-oring-seal-kalrez","product_tag-dupont-kalrez","product_tag-gioang-cao-su","product_tag-o-ring","product_tag-oring","product_tag-phot","product_tag-phot-kalrez-9100","product_tag-seal"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v24.7 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>DuPont\u2122 Kalrez\u00ae 9100 - C\u00d4NG TY TNHH C\u00d4NG NGH\u1ec6 FILTERFINE VI\u1ec6T NAM<\/title>\n<meta name=\"description\" content=\"Kalrez\u00ae 9100 \u2013 ph\u1edbt FFKM cao c\u1ea5p t\u1eeb DuPont\u2122, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean bi\u1ec7t cho m\u00f4i tr\u01b0\u1eddng plasma kh\u1eafc nghi\u1ec7t trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn. S\u1ea3n ph\u1ea9m mang l\u1ea1i tu\u1ed5i th\u1ecd ph\u1edbt g\u1ea5p 3 l\u1ea7n, gi\u1ea3m sinh h\u1ea1t v\u00e0 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 k\u00edn tuy\u1ec7t \u0111\u1ed1i.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/filterfinevn.com\/product\/phot-dupont-kalrez-9100\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"[:vi]Ph\u1edbt DuPont\u2122 Kalrez\u00ae 9100[:en]DuPont\u2122 Kalrez\u00ae 9100[:] - C\u00d4NG TY TNHH C\u00d4NG NGH\u1ec6 FILTERFINE VI\u1ec6T NAM\" \/>\n<meta property=\"og:description\" content=\"Kalrez\u00ae 9100 \u2013 ph\u1edbt FFKM cao c\u1ea5p t\u1eeb DuPont\u2122, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean bi\u1ec7t cho m\u00f4i tr\u01b0\u1eddng plasma kh\u1eafc nghi\u1ec7t trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn. 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