{"id":2042,"date":"2025-05-13T10:47:15","date_gmt":"2025-05-13T03:47:15","guid":{"rendered":"https:\/\/filterfinevn.com\/?post_type=product&p=2042"},"modified":"2025-07-18T16:12:39","modified_gmt":"2025-07-18T09:12:39","slug":"bo-loc-khi-gatekeeper-gpu","status":"publish","type":"product","link":"https:\/\/filterfinevn.com\/en\/product\/bo-loc-khi-gatekeeper-gpu\/","title":{"rendered":"GateKeeper\u00ae GPU GAS PURIFIER"},"content":{"rendered":"

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GateKeeper\u00ae GPU Gas Purifier<\/strong><\/h1>\n


Product Overview<\/strong><\/h2>\n

The GateKeeper\u00ae GPU<\/strong> is Entegris\u2019 premium line of gas purifiers, engineered to remove impurities down to parts per trillion (ppt)<\/strong> levels. Designed for maximum purity in microelectronics processing, this purifier is compatible with a wide range of gases\u2014including corrosive types like Cl\u2082, HBr, HCl, CF\u2084, SO\u2082, and SF\u2086\u2014making it an ideal solution for high-purity applications.<\/p>\n

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Technical Specifications<\/strong><\/h2>\n
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\n\n\n\n\n\n\n\n\n\n
Model<\/th>\nMax Flow Rate<\/th>\nCompatible Gases<\/th>\nRemoved Impurities<\/th>\nRegenerable<\/th>\nOperating Temp.<\/th>\nMax Operating Pressure<\/th>\nHousing Material<\/th>\n<\/tr>\n<\/thead>\n
GPU HX<\/strong><\/td>\n1000 slpm<\/td>\nH\u2082, D\u2082, N\u2082, Ar, He, Ne, Kr, Xe, H\u2082\/N\u2082<\/td>\nH\u2082O, O\u2082, CO, CO\u2082 < 100 ppt<\/td>\nYes<\/td>\n0\u201365\u00b0C<\/td>\n1.2 MPa (12 bar)<\/td>\n316L Stainless Steel<\/td>\n<\/tr>\n
GPU IX<\/strong><\/td>\n1000 slpm<\/td>\nN\u2082, Ar, He, Kr, Ne, Xe, CF\u2084, CH\u2084, C\u2082H\u2086, C\u2083H\u2088, C\u2084H\u2081\u2080<\/td>\nH\u2082O, O\u2082, CO, CO\u2082, H\u2082 < 100 ppt; Sulfur Compounds < 1 ppb<\/td>\nYes<\/td>\n0\u201365\u00b0C<\/td>\n1.2 MPa (12 bar)<\/td>\n316L Stainless Steel<\/td>\n<\/tr>\n
GPU YX<\/strong><\/td>\n1000 slpm<\/td>\nNH\u2083, C\u2082H\u2084, GeH\u2084, CSiH\u2086, C\u2082H\u2087N, C\u2083H\u2086, SF\u2086, H\u2082\/SiH\u2084<\/td>\nH\u2082O, O\u2082, CO\u2082, Hydrocarbons >C\u2084, Metals < 1 ppb<\/td>\nYes<\/td>\n0\u201365\u00b0C<\/td>\n1.2 MPa (12 bar)<\/td>\n316L Stainless Steel<\/td>\n<\/tr>\n
GPU CX<\/strong><\/td>\n1000 slpm<\/td>\nHCl, Cl\u2082<\/td>\nOrganics, Metals, H\u2082O < 15 ppb<\/td>\nNo<\/td>\n0\u201365\u00b0C<\/td>\n1.2 MPa (12 bar)<\/td>\n316L Stainless Steel<\/td>\n<\/tr>\n
GPU CO<\/strong><\/td>\n1000 slpm<\/td>\nCO<\/td>\nH\u2082O, O\u2082, CO\u2082 < 1 ppb<\/td>\nNo<\/td>\n0\u201365\u00b0C<\/td>\n1.2 MPa (12 bar)<\/td>\n316L Stainless Steel<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
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Key Features<\/strong><\/h2>\n