{"id":2036,"date":"2025-05-13T10:09:51","date_gmt":"2025-05-13T03:09:51","guid":{"rendered":"https:\/\/filterfinevn.com\/?post_type=product&p=2036"},"modified":"2025-07-18T16:24:26","modified_gmt":"2025-07-18T09:24:26","slug":"bo-loc-khi-wafergard-iii-nf-mini-mini-xl-in-line","status":"publish","type":"product","link":"https:\/\/filterfinevn.com\/en\/product\/bo-loc-khi-wafergard-iii-nf-mini-mini-xl-in-line\/","title":{"rendered":"Wafergard\u00ae III NF Mini \/ Mini XL In-line GAS FILTER"},"content":{"rendered":"

<\/p>\n

Wafergard\u00ae III NF Mini \/ Mini XL In-line Gas Filter<\/strong><\/h1>\n


Product Overview<\/strong><\/h2>\n

The Wafergard\u00ae III NF Mini and Mini XL In-line gas filters provide ultra-clean, high-performance filtration tailored for critical gas systems requiring superior purity and durability. Designed with an all-metal body and proprietary sintered nickel membrane, these filters are ideal for demanding applications in semiconductor manufacturing, electronics, and chemical processing industries.<\/p>\n

\n

Technical Specifications<\/strong><\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Specification<\/th>\nWafergard\u00ae III NF Mini In-line<\/th>\nWafergard\u00ae III NF Mini XL In-line<\/th>\n<\/tr>\n<\/thead>\n
Part Numbers<\/td>\nWG3NS1RR2<\/td>\nWG3NS2RR2 \/ WG3NS2RR4<\/td>\n<\/tr>\n
Maximum Flow Rate<\/td>\n60 slpm<\/td>\n120 slpm<\/td>\n<\/tr>\n
Connection Size<\/td>\n1\/4″ or 1\/2″ Gasket seal (VCR compatible)<\/td>\n1\/4″ or 1\/2″ Gasket seal (VCR compatible)<\/td>\n<\/tr>\n
Length<\/td>\n84.1 mm (3.31″)<\/td>\n127.0 mm (5.00″) \/ 133.3 mm (5.25″)<\/td>\n<\/tr>\n
Filter Media<\/td>\nProprietary sintered nickel membrane<\/td>\nProprietary sintered nickel membrane<\/td>\n<\/tr>\n
Housing Material<\/td>\nElectro-polished 316L stainless steel<\/td>\nElectro-polished 316L stainless steel<\/td>\n<\/tr>\n
Post-Filter Particle Cleanliness<\/td>\n< 0.03 particles\/liter (>0.01 \u00b5m)<\/td>\n< 0.03 particles\/liter (>0.01 \u00b5m)<\/td>\n<\/tr>\n
Particle Retention Efficiency<\/td>\n99.9999999% (9 LRV) @ 60 slpm<\/td>\n99.9999999% (9 LRV) @ 120 slpm<\/td>\n<\/tr>\n
Maximum Inlet Pressure<\/td>\n16.2 MPa (162 bar) @ 20\u00b0C<\/td>\n16.2 MPa (162 bar) @ 20\u00b0C<\/td>\n<\/tr>\n
Maximum Operating Temperature<\/td>\n400\u00b0C (inert gases); 50\u00b0C (corrosive gases)<\/td>\n400\u00b0C (inert gases); 50\u00b0C (corrosive gases)<\/td>\n<\/tr>\n
Helium Leak Rate<\/td>\nTested to 1\u00d710\u207b\u2079 atm-cc\/sec<\/td>\nTested to 1\u00d710\u207b\u2079 atm-cc\/sec<\/td>\n<\/tr>\n
Warranty<\/td>\n5 years<\/td>\n5 years<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
<\/div>\n<\/div>\n<\/div>\n<\/div>\n
\n

Key Features<\/strong><\/h2>\n