{"id":2011,"date":"2025-05-12T14:44:57","date_gmt":"2025-05-12T07:44:57","guid":{"rendered":"https:\/\/filterfinevn.com\/?post_type=product&p=2011"},"modified":"2025-05-12T14:45:30","modified_gmt":"2025-05-12T07:45:30","slug":"bo-loc-khi-wafergard-max-ht-in-line","status":"publish","type":"product","link":"https:\/\/filterfinevn.com\/en\/product\/bo-loc-khi-wafergard-max-ht-in-line\/","title":{"rendered":"Wafergard\u00ae MAX HT In-line GAS FILTER"},"content":{"rendered":"

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Wafergard\u00ae MAX HT In-line Gas Filter<\/strong><\/h1>\n


Product Introduction<\/strong><\/h2>\n

The Wafergard\u00ae MAX HT In-line<\/strong> gas filter is a high-performance filtration solution developed by Entegris<\/strong>, designed specifically for ultra-high-purity gas applications<\/strong> at elevated temperatures, such as TEOS and high-k processes in CVD systems<\/strong>. With a compact design, heat resistance up to 200\u00b0C<\/strong>, and exceptional particle retention efficiency, this product is an ideal choice for modern gas delivery systems in the semiconductor<\/strong> and electronics industries<\/strong>.<\/p>\n

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Technical Specifications<\/strong><\/h2>\n
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Product Code<\/th>\nLength<\/th>\nFilter Media<\/th>\nHousing Material<\/th>\nParticle Retention Size<\/th>\nParticle Retention Efficiency<\/th>\nMax Operating Pressure<\/th>\nMax Operating Temperature<\/th>\nConnection Type<\/th>\n<\/tr>\n<\/thead>\n
WGMXMPRR4HT<\/td>\n127 mm<\/td>\nPTFE<\/td>\n316L Stainless Steel<\/td>\n\u22650.0015 \u00b5m<\/td>\n\u226599.9999999% @ 25\u00b0C<\/td>\n0.99 MPa (143.15 psig)<\/td>\n200\u00b0C (392\u00b0F)<\/td>\n1\/2″ VCR\u00ae<\/td>\n<\/tr>\n
WGMXMPRR4HTL<\/td>\n148 mm<\/td>\nPTFE<\/td>\n316L Stainless Steel<\/td>\n\u22650.0015 \u00b5m<\/td>\n\u226599.9999999% @ 25\u00b0C<\/td>\n0.99 MPa (143.15 psig)<\/td>\n200\u00b0C (392\u00b0F)<\/td>\n1\/2″ VCR\u00ae<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
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Key Features<\/strong><\/h2>\n